Micro Electronic and Mechanical Systems
by Kenichi Takahata
Publisher: InTech 2009
Number of pages: 386
This book discusses key aspects and the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field.
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